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6041304 Device, Manufacturing and Characterization Methodology of Integrated Circuits

Editor:xdx Date:2017-12-14 Hits:27

The course  introduces the principle on integrated circuit and test. The main contents include the flow of integrated circuit process and its principle, the process planning and parameter selection, and the test theory and method.  Manufacturing part involves technological environment, thin film preparation, doping, lithography and etching, and metallization. The test section involves the key parameter evolution of microelectronic device, and the establishment of simulation model for PDK.  This course integrates theory with practice as a whole, which is interspersed with an appropriate amount of experimental procedures, and hence enhance students' practical ability and consolidate theoretical knowledge.

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